| 摘要: |
| 针对近年来受到广泛关注的微半球热成型工艺，研究了表面张力、黏性力、惯性力、重力及压差对成型的影响，得出了黏性力在成型过程中起主导作用，表面张力、惯性力及重力对成型的影响可以忽略，压差的变化不影响成型的形状，只影响成型的速度的结论，并通过仿真及实验验证了该结论。 |
| 关键词: 微半球陀螺 谐振子 热成型 黏性力 |
| DOI： |
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| 基金项目: |
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| Research on Thermoforming of mHRG Resonator |
| LIN Zhi-hui,ZHOU Bin,ZHANG Tian,XING Hai-feng,ZHANG Rong |
| (Department of Precision Instruments, Tsinghua University，Beijing 100084，China) |
| Abstract: |
| The influence of surface tension, viscosity, inertial force, gravity and pressure difference on thermoforming of mHRG resonator is studied, which has received much attention in recent years. The influence of viscosity is found to be dominant in thermoforming, while the influence of surface tension, inertial force and gravity are negligible. The change of pressure difference will merely influence the speed of thermoforming, and will not affect the shape of resonator. Both simulation and experiment are carried out to prove the conclusion |
| Key words: Micro hemisphere gyroscope Oscillator Thermoforming Viscous force |
