| 摘要: |
| 电容式MEMS角速率传感器零位的全温稳定性是其实用化的最重要的技术指标之一。分析了陀螺工作原理,从传感器敏感表头的空气阻尼、谐振频率等方面分析了机械结构的温度特性,得出了在全温区内驱动力与传感器零位输出的相关性。根据对陀螺表头和接口电路的温度特性分析,设计了恒定跨导高线性度的运算放大器,实现了全温低相位偏移、低幅值偏移的接口ASIC,并在高压N阱COMS工艺下流片。通过驱动力信号对零位进行温度补偿,包含了机械结构刚度和空气热阻尼等因素的影响,理论上比单独的谐振频率补偿更准确,而且驱动力信号可直接由接口电路给出,避免复杂的采样。在-40℃~60℃的温度范围内进行零位温度循环测试,驱动力幅值对零位输出进行三阶拟合补偿,补偿后全温零位温度漂移小于26.7（°）/h(1σ)。 |
| 关键词: MEMS陀螺 接口ASIC 低温漂 温度补偿 |
| DOI： |
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| 基金项目: |
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| Research on the Temperature Characteristic andCompensation of Capacitive MEMS Gyroscope |
| DI Xin-peng,CHEN Wei-ping,LIU Xiao-wei |
| (School of Astronautics, Harbin Institute of Technology,Harbin 150001,China) |
| Abstract: |
| For capacitive MEMS angular velocity sensor, the full temperature stability of zero point is one of the most important technical indexes practically.Based on the principle of yroscope, The correlation between driven-force and zero-point output of sensor is summarized according to the analysis of temperature characteristic of physical structure in terms of air-damping and resonant frequency of sensor header.And based on this analysis, a constant trans-conductance high-linearity amplifier is designed to realize the low phase-drift and low amplitude-drift interface ASIC at full-temperature range.The chip is fabricated in a standard 0.5 μm CMOS process.Compensation,which is more accurate than resonant frequency, in theory, achieved by driven-force to zero-point drift amd caused by the stiffness of physical construction and air-damping, is adopted.Moreover, the driven-force signal can be obtained from the drive-circuit to avoid complex sampling.The test result shows the zero-point drift is lower than 26.7（°）/h (1-sigma) at the temperature range from-40℃ to 60℃ after three-order compensation made by driven-force amplitude |
| Key words: MEMS gyroscope Interface ASIC Low temperature drift Temperature compensation |
