半球谐振陀螺用石英玻璃性能及湿法刻蚀特性

Properties and Wet Etching Properties of Fused Silica Glass for HRG

关键词:  熔融石英玻璃  湿法刻蚀  半球谐振陀螺

Key words:  Fused silica glass  Wet etching  HRG

摘要:

熔融石英玻璃是半球谐振陀螺的关键核心材料。针对半球谐振陀螺用石英玻璃及湿法刻蚀减薄工序，分析了石英玻璃种类、性能指标差异，研究了熔融石英玻璃湿法刻蚀过程表面缺陷及形态变化。结果表明，熔融石英玻璃机械加工残留的亚表面缺陷在湿法刻蚀过程中会发生形态和大小变化，对熔融石英玻璃的均匀刻蚀影响较大。基于上述研究结果，给出了半球谐振陀螺的选材和球壳湿法刻蚀减薄工艺参考。

Abstract:

Fused silica glass is the key material of hemispheric resonant gyroscope (HRG). In view of the fused silica glass used in HRG and the process of spherical shell wet etching thinning, the comparison of performance for different types of fused silica glass are displayed. In addition, the subsurface defects and morphological changes of fused silica glass during wet etching process are also analyzed in this paper. The results show that the morphology and the size of subsurface damage in fused silica glass changes during wet etching, which has a great influence on the uniform etching of fused silica glass. Based on the above research results, the material selection of HRG and the wet etching process of spherical shell are given.