新型微光机电系统惯性测量技术研究进展

Research Progress on New Micro-Opto-Electro-Mechanical System Inertial Measurement Technology

关键词:  微惯性测量技术  微机电系统  微光机电系统  微腔光力系统  量子增强型传感技术

Key words:  MIMU  MEMS  MOEMS  Cavity optomechanical system  Quantum-enhanced sensing technology

摘要:

微惯性测量单元(MIMU)是惯性导航系统(INS)的核心组件，亦是构建微定位导航授时（μ-PNT）系统的重要组成部分。当前成熟的微惯性测量单元主要基于微机电系统（MEMS）实现，其性能逐渐难以满足新型无人驾驶车、无人飞行器以及制导弹药、航空航天器等军民用领域对高精确惯性导航的需求。近年来,各种新型微惯性测量技术相继被提出，以期望突破微惯性测量单元的性能与尺寸、质量、功耗（SWaP）之间相互制约的关键技术难题。系统总结了近年来国内外在常规MEMS惯性测量技术以及新型微光机电系统（MOEMS）惯性测量、微腔光力惯性测量、量子精密测量等几类新型惯性测量技术方面的研究进展，展望了未来新型高精度惯性测量技术的发展趋势，并提出了一种基于腔光力系统的量子增强型惯性测量技术构想。

Abstract:

Micro inertial measurement unit (MIMU) is not only the core component of inertial navigation system (INS), but also an important part of micro-technology for positioning, navigation and timing (μ-PNT) service system. At present, the well-developed MIMU is mainly realized by the micro-electro-mechanical system (MEMS), however, its performance cannot meet the increasing requirements for high-precision inertial navigation in the civilian areas such as unmanned vehicles, unmanned aerial vehicles, and military areas such as missiles, aerospace vehicles. In recent years, a variety of new micro inertial measurement technologies have been proposed to break the key technical problems of MIMU, namely the intra-restriction between the precision performance and the size, weight, and power consumption (SWaP). This review paper aims to summarize the research progress of the conventional MEMS inertial measurement technology, and the newly-developed micro-opto-electro-mechanical system (MOEMS) inertial sensing, cavity optomechanical inertial sensing and quantum sensing technologies in recent years, forcast the future development trends of new high-precision inertial measurement technologies, and propose a novel concept of quantum enhanced inertial measurement unit based on cavity optomechanical system.