| 摘要: |
| MEMS陀螺是一种应用广泛的新型微惯性传感器，可实现高精度、小体积、抗干扰性强的角速度测量，被广泛应用于航空航天、平台钻井、自动驾驶、可穿戴设备以及手机中。近年来，随着对MEMS陀螺研究的不断深入，许多新型MEMS陀螺的工作原理被提出，由于测量原理的不同，其性能差异往往很大。本文旨在解决对MEMS陀螺的工作模式缺少系统性综述的问题,根据陀螺最终的读出技术，将MEMS陀螺的工作模式分为调幅、全角以及调频模式。在系统介绍其工作原理的基础上，详细讨论了各种工作模式下MEMS陀螺的性能提升方法。最后还介绍了各类MEMS陀螺的发展趋势，并结合各模式特性对MEMS陀螺的发展做出了展望。 |
| 关键词: MEMS陀螺 调幅模式 全角模式 调频模式 误差补偿 |
| DOI： |
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| 基金项目:陕西省杰出青年科学基金项目(2022JC-49） |
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| The working principle of MEMS gyroscope and its performance enhancement method |
| WANG Xiaoxu,CHEN Zhennan,YAN Kaichen,LI Rui,ZHANG Ao,WANG Xiquan,WANG Yupeng,LU Qianbo |
| (School of Automation, Northwestern Polytechnical University, Xi'an 710072, China;Institute of Flexible Electronics, Northwestern Polytechnical University, Xi'an 710072, China; Ningbo Institute of Northwestern Polytechnical University, Ningbo, Zhejiang 315103, China) |
| Abstract: |
| The micro-electro-mechanical system(MEMS) gyroscope represents a new type of multifunctional micro-inertial sensor enabling angular velocity measurements with characteristics of high precision, small size and robustness to external interference, which finds extensive utilization across various domains, including aerospace, platform drilling, autonomous driving, wearable devices and smart phones. In recent years, with the continuous research on MEMS gyroscope, many new operation modes have been proposed, whereas their performance often varies greatly due to the different measurement principles. This paper aims to solve the problem of lack of systematic review of the operation modes of MEMS gyroscope. According to the readout technology, the operation modes of MEMS gyroscope are classified into amplitude modulated(ＡＭ), whole-angle(ＷＡ) and frequency modulated(ＦＭ) gyroscopes. Based on the systematic introduction of their working principles, the performance improvement methods of MEMS gyroscopes in various operating modes are discussed in detail. Finally, the development trend of various types of MEMS gyroscopes is also introduced to meet the growing demand for MEMS gyroscopes, and the development of MEMS gyroscopes with the combination of the characteristics of the modes is prospected. |
| Key words: MEMS gyroscope Amplitude modulated mode Whole angle mode Frequency modulated mode Error compensation |
